ReticleSense™ | 新款APSRQ产品发布

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   APSRQ_350-355

 
Features:
 
  • Reticle-shaped.  Also available in 150mm, 200mm and 300mm wafer sizes.
  • Measures particles greater than 15 microns.  Reports particles in 0.1μm and 0.5μm bin sizes and larger particles in 2, 5, 10 and 30 μm bin sizes.
  • Wireless.  Transmits data to your laptop of PC in real-time.
  • Easy-to-use software.  ParticleView and ParticleReview application software provides the user with real time visual feedback and can record and replay logged data for review and analysis.
 
 
ParticleSpectrum™
 
  • ParticleSpectrum

 

发表日期: 2017年1月25日
通过无线实时监控Particle,优化机台装机过程和长期良率
- 无线量测加速机台验证
- 光罩型特点帮助缩短机台维护时间
- 更低的机台成本支出,并提供客观、可重复的数据